A User's Guide to Vacuum Technology by John F. O'Hanlon

By John F. O'Hanlon

Within the decade and a part because the e-book of the second one variation of A User?s advisor to hoover Technology there were many vital advances within the box, together with spinning rotor gauges, dry mechanical pumps, magnetically levitated faster pumps, and ultraclean method designs. those, in addition to more advantageous cleansing and meeting thoughts have made contamination-free production a truth. Designed to bridge the space in either wisdom and coaching among designers and finish clients of vacuum gear, the 3rd variation deals a realistic standpoint on today?s vacuum expertise. With a spotlight at the operation, figuring out, and choice of kit for commercial procedures utilized in semiconductor, optics, packaging, and similar coating applied sciences, A User?s consultant to hoover Technology, 3rd version presents an in depth remedy of this crucial box. whereas emphasizing the basics and referring to major issues now not effectively lined in different places, the textual content avoids issues no longer suitable to the common person.

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These relations for long tubes are of limited use. They are of use in components such as mass flow meter tubes, controlled leaks, and piping that connects chambers with remotely located pumps and gas tanks. In most practical cases we connect chambers with as short a duct as possible to reduce unwanted pressure drops, and we need to know relationships which are valid for these cases. 3 Short Round Tubes As we noted above, the flow in short tubes does not obey the Poiseuille equation. The flow may switch fiom viscous to to critical flow without there being any pressure region in which the Poiseuille equation is valid.

42, L. L. Levenson et al. Copyright 1963, Soci6t6 Francaise des Ingeneiurs et Techniciens du Vide. 45" 8 . so" 1 I 1 1 I - - I Fig. 9 Molecular transmission probability of a chevron baffle. Reprinted with permission from Le Vide, No. 103, p. 42, L. L. Levenson et al. Copyright 1963, SocitSttS Francaise des Ingeneiurs et Techniciens du Vide. 51 t - 0 ? - . - - L 1 2 3 4 WR 5 5 6 7 8 Fig. 10 Molecular transmission probability of an elbow. Reprinted with permission fromJ. Appl. , 31, p. 1169, D. H.

103, p. 42, L. L. Levenson et al. Copyright 1963, Soci6tte Francaise des Ingeneiurs et Techniciens du Vide. 5 -1 Without Central Plate With Central Plate Fig. 6 Molecular transmission probability of a round pipe with entrance and exit apertures. Reprinted with permission from J. Appl. , 31, p. 1169, D. H. Davis. Copyright 1960, The American Institute of Physics. 0 I I ; b ; I UR I Ib I 1; 1 If I 1; I Fig. 7 Molecular transmission probability of an annular cylindrical pipe. Reprinted with permission from Le Vide, No.

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